The Influence Of Oxygen Partial-Pressure And Total Pressure (O2+Ar) On The Properties Of Tin Oxide-Films Prepared By Dc Sputtering

AuthID
P-001-JA3
2
Author(s)
Document Type
Article
Year published
1994
Published
in VACUUM, ISSN: 0042-207X
Volume: 45, Issue: 12, Pages: 1191-1195 (5)
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Publication Identifiers
Scopus: 2-s2.0-0028681905
Wos: WOS:A1994PU78200006
Source Identifiers
ISSN: 0042-207X
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