Direct-Current Reactive Magnetron-Sputtered Zinc-Oxide Thin-Films - The Effect Of The Sputtering Pressure

AuthID
P-001-JJM
2
Author(s)
Document Type
Article
Year published
1994
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 250, Issue: 1-2, Pages: 26-32 (7)
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Publication Identifiers
Scopus: 2-s2.0-0028517003
Wos: WOS:A1994PJ73100005
Source Identifiers
ISSN: 0040-6090
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