Influence Of The Target/Shield Distance On The Coatings Deposition By Rf Magnetron Sputtering

AuthID
P-001-JJV
3
Author(s)
FILIPE, N
·
Document Type
Article
Year published
1994
Published
in VACUUM, ISSN: 0042-207X
Volume: 45, Issue: 10-11, Pages: 1099-1100 (2)
Conference
1St European Topical Conference on Hard Coatings (Etchc-1)/2Nd Iberian Vacuum Meeting (Ii Riva), Date: JUL 12-15, 1993, Location: ALICANTE, SPAIN
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Publication Identifiers
Scopus: 2-s2.0-0028518424
Wos: WOS:A1994PH23600033
Source Identifiers
ISSN: 0042-207X
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