Simultaneous Depth Profiling of Constituents and Impurities by Elastic Proton Scattering in Amorphous Hydrogenated Silicon Films

AuthID
 P-00F-TNQ
4
Author(s)
Kolodzey, JS
·
Wagner, S
·
Kouzes, RT
Document Type
Article
Year published
1987
Published
in Applied Physics Letters, ISSN: 0003-6951
Volume: 50, Issue: 4, Pages: 188-190
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Publication Identifiers
Scopus: 2-s2.0-36549091523
Source Identifiers
ISSN: 0003-6951
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