Characterization of Si3N4 Thin Films Prepared by R.f. Magnetron Sputtering

AuthID
 P-00F-TZM
5
Author(s)
Prieto, C
·
Miranzo, P
·
Osendi, MI
·
Ramirez, R
Document Type
Article
Year published
2002
Published
in Surface and Coatings Technology, ISSN: 0257-8972
Volume: 151-152, Pages: 67-71
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Publication Identifiers
Scopus: 2-s2.0-4243545708
Source Identifiers
ISSN: 0257-8972
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