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Hybrid Aerosol Assisted Atmospheric Pressure Chemical Vapour Deposition: A Facile Route Toward Nano-Composite Thin Films?

AuthID
P-00F-W81

Author(s)

Saeli, M

Piccirillo, C

Parkin, IP

Binions, R

Document Type

Proceedings Paper

Year published

2009

Published

in ECS Transactions, ISSN: 1938-5862

Volume: 25, Issue: 8 PART 2, Pages: 773-780

Conference

17Th International Chemical Vapor Deposition Symposium (Cvd-Xvii) - 216Th Meeting of the Electrochemical Society, Date: 4 October 2009 through 9 October 2009, Location: Vienna, Sponsors: High Temperature Materials;Dielectric Science and Technology;Electronics and Photonics

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