Micromachined Silicon Accelerometer with Fiber Optic Interrogation

AuthID
P-00G-2FZ
Document Type
Proceedings Paper
Year published
1993
Published
in Proceedings of SPIE - The International Society for Optical Engineering, ISSN: 0277-786X
Volume: 1793, Pages: 27-33
Conference
Proceedings of the First Conference on Integrated Optics and Microstructure, Date: 8 September 1992 through 9 September 1992, Location: Boston, MA, USA, Sponsors: SPIE - Int Soc for Opt Engineering, Bellingham, WA, USA
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Publication Identifiers
Scopus: 2-s2.0-0027277371
Source Identifiers
ISSN: 0277-786X
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