Effect of Methane Concentration in Hydrogen Plasma on Hydrogen Impurity Incorporation in Thick Large-Grained Polycrystalline Diamond Films

AuthID
P-00G-CK0
5
Author(s)
Document Type
Article
Year published
2015
Published
in JOURNAL OF CRYSTAL GROWTH, ISSN: 0022-0248
Volume: 426, Pages: 221-227 (7)
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Publication Identifiers
Scopus: 2-s2.0-84934758137
Wos: WOS:000358745700034
Source Identifiers
ISSN: 0022-0248
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