Energy Deposition and Substrate Heating During Magnetron Sputtering

AuthID
P-001-MVH
Document Type
Article
Year published
1993
Published
in VACUUM, ISSN: 0042-207X
Volume: 44, Issue: 8, Pages: 809-813 (5)
Indexing
Publication Identifiers
Scopus: 2-s2.0-0027640570
Wos: WOS:A1993LJ32900007
Source Identifiers
ISSN: 0042-207X
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