Direct Current Reactive Magnetron Sputtered Zinc Oxide Thin Films —The Effect of the Sputtering Pressure

AuthID
P-00H-65E
2
Author(s)
dos Santos, M
Document Type
Article
Year published
1994
Published
in Thin Solid Films, ISSN: 0040-6090
Volume: 250, Issue: 1-2, Pages: 26-32
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ISSN: 0040-6090
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