Study of Annealed Indium Tin Oxide Films Prepared by Rf Reactive Magnetron Sputtering

AuthID
 P-00H-65X
3
Author(s)
Maçarico, A
·
Document Type
Article
Year published
1995
Published
in Vacuum, ISSN: 0042-207X
Volume: 46, Issue: 7, Pages: 673-680
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ISSN: 0042-207X
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