Vacancy-Acceptor Complexes in Germanium Produced by Ion Implantation

AuthID
P-00H-6ES
7
Author(s)
Feuser, U
·
Vianden, R
·
da Silva, M
·
Szilágyi, E
·
Pászti, F
·
Soares, J
Document Type
Article
Year published
1991
Published
in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, ISSN: 0168-583X
Volume: 59-60, Pages: 1049-1052
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ISSN: 0168-583X
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