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Epitaxial Regrowth and Lattice Location of Indium Implanted in Arsenic-Preamorphized Silicon
AuthID
P-00H-6EV
9
Author(s)
Alves, E
·
Da Silva, M
·
Soares, J
·
Melo, A
·
May, J
·
Haslar, V
·
Seidl, P
·
Feuser, U
·
Vianden, R
Document Type
Article
Year published
1991
Published
in
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms,
ISSN: 0168-583X
Volume: 55, Issue: 1-4, Pages: 580-584
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DOI
:
10.1016/0168-583x(91)96235-d
Source Identifiers
ISSN
: 0168-583X
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