Morphology And Thickness Distribution Of Sputtered W-C-Co Films Deposited On Differently Shaped Substrates

AuthID
 P-001-Q8D
2
Author(s)
Document Type
Article
Year published
1991
Published
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 49, Issue: 1-3, Pages: 311-315 (5)
Conference
18Th International Conf On Metallurgical Coatings And Thin Films, Date: APR 22-26, 1991, Location: SAN DIEGO, CA, Sponsors: AMER VACUUM SOC, DIV VACUUM TECHNOL, AMER VACUUM SOC, DIV THIN FILMS
Indexing
Wos®
Scopus®
Publication Identifiers
Scopus: 2-s2.0-0026360647
Wos: WOS:A1991GX59100055
Source Identifiers
ISSN: 0257-8972
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