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Morphology And Thickness Distribution Of Sputtered W-C-Co Films Deposited On Differently Shaped Substrates
AuthID
P-001-Q8D
2
Author(s)
CAVLEIRO, A
·
VIEIRA, MT
Document Type
Article
Year published
1991
Published
in
SURFACE & COATINGS TECHNOLOGY,
ISSN: 0257-8972
Volume: 49, Issue: 1-3, Pages: 311-315 (5)
Conference
18Th International Conf On Metallurgical Coatings And Thin Films,
Date:
APR 22-26, 1991,
Location:
SAN DIEGO, CA,
Sponsors:
AMER VACUUM SOC, DIV VACUUM TECHNOL, AMER VACUUM SOC, DIV THIN FILMS
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Scopus
: 2-s2.0-0026360647
Wos
: WOS:A1991GX59100055
Source Identifiers
ISSN
: 0257-8972
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