Role of the Rf Frequency on the Structure and Composition of Polymorphous Silicon Films

AuthID
 P-00H-BJ3
6
Author(s)
Raniero, L
·
Viana, A
·
Document Type
Article
Year published
2004
Published
in Journal of Non-Crystalline Solids, ISSN: 0022-3093
Volume: 338-340, Pages: 183-187
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ISSN: 0022-3093
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