High Precision Determination of the Inn Content of Al1−Xinxn Thin Films by Rutherford Backscattering Spectrometry

AuthID
P-00H-CJT
5
Author(s)
Magalhães, S
·
Barradas, N
·
Watson, I
·
Document Type
Article
Year published
2012
Published
in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, ISSN: 0168-583X
Volume: 273, Pages: 105-108
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ISSN: 0168-583X
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