Self-Consistent Depth Profiling and Imaging of Gan-Based Transistors Using Ion Microbeams

AuthID
 P-00H-CK0
4
Author(s)
Redondo-Cubero, A
·
Vázquez, L
·
Alves, L
Document Type
Article
Year published
2015
Published
in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, ISSN: 0168-583X
Volume: 348, Pages: 246-250
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ISSN: 0168-583X
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