Epitaxial Regrowth And Lattice Location Of Indium Implanted In Arsenic-Preamorphized Silicon

AuthID
P-001-QVQ
9
Author(s)
DASILVA, MF
·
MELO, AA
·
MAY, J
·
HASLAR, V
·
SEIDL, P
·
FEUSER, U
·
VIANDEN, R
Document Type
Article
Year published
1991
Published
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 55, Issue: 1-4, Pages: 580-584 (5)
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Publication Identifiers
Scopus: 2-s2.0-44949271083
Wos: WOS:A1991FN79500113
Source Identifiers
ISSN: 0168-583X
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