Rbs Characterization of the Iridium Diffusion in Silicon

AuthID
 P-00H-FNM
6
Author(s)
Rodrı́guez, A
·
González, C
·
Rodrı́guez, T
·
da Silva, M
·
Soares, J
Document Type
Article
Year published
2000
Published
in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, ISSN: 0168-583X
Volume: 161-163, Pages: 663-667
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ISSN: 0168-583X
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