Direct Evidence for Substitutional Li After Ion-Implantation into Highly Phosphorus-Doped Si

AuthID
 P-00H-M5K
5
Author(s)
Hofsäss, H
·
Jahn, SG
·
Winter, S
·
Recknagel, E
Document Type
Article
Year published
1993
Published
in Appl. Phys. Lett. - Applied Physics Letters, ISSN: 0003-6951
Volume: 62, Issue: 7, Pages: 684
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ISSN: 0003-6951
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