Fast Eedf Probe Measurement in Surface Wave Discharges Using a Dc Coupled Stepped Signal

AuthID
 P-00H-PN6
1
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Article
Year published
1995
Published
in Plasma Sources Sci. Technol. - Plasma Sources Science and Technology, ISSN: 0963-0252
Volume: 4, Issue: 1, Pages: 86-93
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ISSN: 0963-0252
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