Current–Pressure–Voltage Characteristics in a Planar Magnetron Discharge

AuthID
 P-00H-WX1
5
Author(s)
Escrivão, ML
·
Teixeira, MR
·
Maneira, MJP
Document Type
Article
Year published
2003
Published
in Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films - J. Vac. Sci. Technol. A, ISSN: 0734-2101
Volume: 21, Issue: 2, Pages: 375
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ISSN: 0734-2101
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