Regrowth Of Indium-Implanted (100), (110) And (111) Silicon-Crystals Studied With Rutherford Backscattering And Perturbed Angular-Correlation Techniques

AuthID
P-001-SDP
6
Author(s)
DASILVA, MF
·
MELO, AA
·
FEUSER, U
·
VIANDEN, R
Document Type
Article
Year published
1989
Published
in MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, ISSN: 0921-5107
Volume: 4, Issue: 1-4, Pages: 189-195 (7)
Conference
Symp At The 1989 Spring Meeting Of The European Materials Soc : Science And Technology Of Defects In Silicon, Date: MAY 30-JUN 02, 1989, Location: STRASBOURG, FRANCE, Sponsors: IBM FRANCE, GATAN, CTR NATL ETUD TELECOMMUN, EUROPEAN MAT RES SOC, Host: COUNCIL EUROPE & EUROPEAN PARLIAMENT
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Publication Identifiers
Scopus: 2-s2.0-0024754504
Wos: WOS:A1989CF45300035
Source Identifiers
ISSN: 0921-5107
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