Effect of Argon Ion Energy on the Performance of Silicon Nitride Multilayer Permeation Barriers Grown by Hot-Wire Cvd on Polymers

AuthID
 P-00J-Y7R
7
Author(s)
Bonnassieux, Y
·
Bouree, JE
Document Type
Article
Year published
2015
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 595, Pages: 258-265 (8)
Indexing
Wos®
Scopus®
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Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-84951777814
Wos: WOS:000365812900010
Source Identifiers
ISSN: 0040-6090
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