Structural Characterization of Dual Ion Implantation in Silicon

AuthID
 P-00J-Z7T
5
Author(s)
Document Type
Article
Year published
2015
Published
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 365, Pages: 39-43 (5)
Indexing
Wos®
Scopus®
Crossref®
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-84948576132
Wos: WOS:000366786900010
Source Identifiers
ISSN: 0168-583X
Export Publication Metadata
Marked List
 Add to Marked List
Info
At this moment we don't have any links to full text documens.

A place for researchers and their institutions

Useful Links

Get Help

© 2024 CRACS & Inesc TEC - All Rights Reserved Privacy Policy | Terms of Service