Thin-Film Paddle Microresonators with High Quality Factors Fabricated at Temperatures Below 110 Degrees C

AuthID
 P-000-68R
4
Author(s)
·
Document Type
Proceedings Paper
Year published
2005
Published
in MEMS 2005 Miami: Technical Digest in PROCEEDINGS: IEEE MICRO ELECTRO MECHANICAL SYSTEMS WORKSHOP, ISSN: 1084-6999
Pages: 125-128 (4)
Conference
18Th Ieee International Conference on Micro Electro Mechanical Systems (Mems), Date: JAN 30-FEB 03, 2005, Location: Miami Beach, FL, Sponsors: IEEE, Robot & Automat Soc
Indexing
Wos®
Scopus®
Publication Identifiers
Scopus: 2-s2.0-26844525941
Wos: WOS:000228430000031
Source Identifiers
ISSN: 1084-6999
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