Structural Analysis of Multilayer Metal Nitride Films Crn/Mon Using Electron Backscatter Diffraction (Ebsd)

AuthID
 P-00M-E16
5
Author(s)
Bondar, O
·
Opielak, M
·
Rogalski, P
·
3
Editor(s)
Vladescu, M; Tamas, R; Cristea, I
Document Type
Proceedings Paper
Year published
2016
Published
in ADVANCED TOPICS IN OPTOELECTRONICS, MICROELECTRONICS, AND NANOTECHNOLOGIES VIII in Proceedings of SPIE, ISSN: 0277-786X
Volume: 10010
Conference
8Th International Conference on Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies (Atom-N), Date: SEP 25-28, 2016, Location: Constanta, ROMANIA, Sponsors: Politehnica Univ Bucharest, Optoelectron Res Ctr, Maritime Univ Constanta, Romanian Minist Educ & Res, Natl Author Sci Res & Innovat, Agilrom Sci, ADVI TECH Consulting SRL
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Publication Identifiers
Scopus: 2-s2.0-85010911885
Wos: WOS:000391359600014
Source Identifiers
ISSN: 0277-786X
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