Phase Tailoring of Tantalum Thin Films Deposited in Deep Oscillation Magnetron Sputtering Mode

AuthID
 P-00M-MFE
5
Author(s)
Sousa, C
·
Cavaleiro, A
·
Anders, A
·
Oliveira, J
Document Type
Article
Year published
2017
Published
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 314, Pages: 97-104 (8)
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Publication Identifiers
Wos: WOS:000397696400016
Source Identifiers
ISSN: 0257-8972
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