Influence of Magnetron Sputtering Conditions on the Chemical Bonding, Structural, Morphological and Optical Behavior of Ta1-Xox Coatings

AuthID
P-00N-8Q1
6
Author(s)
Almeida Alves, CFA
·
Mansilla, C
·
Paumier, F
·
Girardeau, T
·
Document Type
Article
Year published
2018
Published
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 334, Pages: 105-115 (11)
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Publication Identifiers
Scopus: 2-s2.0-85034568998
Wos: WOS:000423894700013
Source Identifiers
ISSN: 0257-8972
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