Lattice Sites of Ion-Implanted Mn, Fe and Ni in 6H-Sic

AuthID
 P-00N-B7G
9
Author(s)
David Bosne, E
·
Document Type
Article
Year published
2018
Published
in SEMICONDUCTOR SCIENCE AND TECHNOLOGY, ISSN: 0268-1242
Volume: 33, Issue: 1, Pages: 015021 (10)
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Scopus®
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Publication Identifiers
Scopus: 2-s2.0-85038619733
Wos: WOS:000418454800001
Source Identifiers
ISSN: 0268-1242
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