Cd Ion Implantation in Aln

AuthID
P-002-4EA
Document Type
Article
Year published
2012
Published
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 289, Pages: 43-46 (4)
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Publication Identifiers
Scopus: 2-s2.0-84867167874
Wos: WOS:000310765500008
Source Identifiers
ISSN: 0168-583X
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