Energy Efficient Micro-Machined Thermal Flow-Rate Sensor Based on Transient Operation Mode

AuthID
P-00P-34Q
9
Author(s)
Shaun, F
·
Sarkar, S
·
Ali, H
·
Poulichet, P
·
Peressutti, F
·
Marty, F
·
Bourouina, T
·
Nefzaoui, E
·
7
Editor(s)
Marcelli,R;Mita,Y;Smith,S;Pressecq,F;Nouet,P;Mailly,F;Schneider,P
Document Type
Proceedings Paper
Year published
2018
Published
in Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018
Pages: 1-3
Conference
20Th Symposium on Design, Test, Integration and Packaging of Mems and Moems, Dtip 2018, Date: 22 May 2018 through 25 May 2018, Sponsors: ARTOV.IMM.CNR.IT;CMP.IMAG.FR;CNRS.FR;EPS.IEEE.ORG;LIRMM.FR
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Scopus: 2-s2.0-85050248716
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