Phase Tailoring of Tantalum Thin Films Deposited in Deep Oscillation Magnetron Sputtering Mode

AuthID
 P-00P-FAP
5
Author(s)
Sousa, C
·
Cavaleiro, A
·
Anders, A
·
Oliveira, J
2
Editor(s)
Lampert, J; Marken, K
Document Type
Proceedings Paper
Year published
2016
Published
in SOCIETY OF VACUUM COATERS 59TH ANNUAL TECHNICAL CONFERENCE PROCEEDINGS, 2016
Pages: 146-154 (9)
Conference
59Th Annual Technical Conference of the Society-Of-Vacuum-Coaters (Svc), Date: MAY 09-13, 2016, Location: Indianapolis, IN, Sponsors: Soc Vacuum Coaters
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Publication Identifiers
Wos: WOS:000405161400021
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