O-2 Dissociation in Ar-O-2 Surface-Wave Microwave Discharges

AuthID
 P-002-A0K
3
Author(s)
·
Document Type
Article
Year published
2012
Published
in JOURNAL OF PHYSICS D-APPLIED PHYSICS, ISSN: 0022-3727
Volume: 45, Issue: 19, Pages: 195205 (8)
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Publication Identifiers
Scopus: 2-s2.0-84860356071
Wos: WOS:000303536500012
Source Identifiers
ISSN: 0022-3727
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