Thin-Film Silicon Mems for Dynamic Mass Sensing in Vacuum and Air: Phase Noise, Allan Deviation, Mass Sensitivity and Limits of Detection

AuthID
 P-00Q-PKR
4
Author(s)
Document Type
Article
Year published
2019
Published
in JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, ISSN: 1057-7157
Volume: 28, Issue: 3, Pages: 390-400 (11)
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Publication Identifiers
Scopus: 2-s2.0-85066983494
Wos: WOS:000470838300009
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ISSN: 1057-7157
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