Amorphous Silicon Self-Rolling Micro Electromechanical Systems: From Residual Stress Control to Complex 3D Structures

AuthID
 P-00Q-Z3S
3
Author(s)
Document Type
Article
Year published
2019
Published
in ADVANCED ENGINEERING MATERIALS, ISSN: 1438-1656
Volume: 21, Issue: 9
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Publication Identifiers
Scopus: 2-s2.0-85070534408
Wos: WOS:000481045100001
Source Identifiers
ISSN: 1438-1656
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