Sub-Micron Mems Accelerometer with Handle-Layer Patterning for Damping Enhancement Using Time Transduction

AuthID
 P-00R-1E8
6
Author(s)
Garcia, IS
·
Document Type
Proceedings Paper
Year published
2019
Published
in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Pages: 2045-2048
Conference
20Th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors Xxxiii, Transducers 2019 and Eurosensors Xxxiii, Date: 23 June 2019 through 27 June 2019, Sponsors: Electron Devices Society (EDS);Hahn-Schickard;IEEE
Indexing
Scopus®
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-85071942905
Export Publication Metadata
Marked List
 Add to Marked List
Info
At this moment we don't have any links to full text documens.

A place for researchers and their institutions

Useful Links

Get Help

© 2024 CRACS & Inesc TEC - All Rights Reserved Privacy Policy | Terms of Service