Incorporation of N in Tio2 Films Grown by Dc-Reactive Magnetron Sputtering

AuthID
 P-002-D1F
6
Author(s)
Munnik, F
Document Type
Article
Year published
2012
Published
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 273, Pages: 109-112 (4)
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Publication Identifiers
Scopus: 2-s2.0-84856116210
Wos: WOS:000300471000031
Source Identifiers
ISSN: 0168-583X
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