Influence of Post-Uv/Ozone Treatment of Ultrasonic-Sprayed Zirconium Oxide Dielectric Films for a Low-Temperature Oxide Thin Film Transistor

AuthID
P-00R-V8C
7
Author(s)
Document Type
Article
Year published
2020
Published
in MATERIALS, ISSN: 1996-1944
Volume: 13, Issue: 1, Pages: 1-14 (14)
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Publication Identifiers
Scopus: 2-s2.0-85096220063
Wos: WOS:000515499300006
Source Identifiers
ISSN: 1996-1944
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