Fabrication and Characterization of Thin-Film Silicon Resonators on 10 Mu M-Thick Polyimide Substrates

AuthID
 P-00R-XR3
7
Author(s)
Pestana, TG
·
Martins, M
·
Gaspar, J
·
Document Type
Article
Year published
2020
Published
in JOURNAL OF MICROMECHANICS AND MICROENGINEERING, ISSN: 0960-1317
Volume: 30, Issue: 4
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Wos®
Scopus®
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Publication Identifiers
Scopus: 2-s2.0-85082005429
Wos: WOS:000537455900007
Source Identifiers
ISSN: 0960-1317
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