Cu Cmp Edge Uniformity Improvement Studies for 32 Nm Technology Node and Beyond

AuthID
 P-00S-32A
9
Author(s)
Zhang, JH
·
Economikos, L
·
Tseng, WT
·
Choi, J
·
Fang, Q
·
Tang, TJ
·
Salfelder, J
·
Truong, C
·
Document Type
Proceedings Paper
Year published
2010
Published
in Materials Research Society Symposium Proceedings, ISSN: 0272-9172
Volume: 1249, Pages: 21-26
Conference
2010 Mrs Spring Meeting, Date: 5 April 2010 through 9 April 2010, Location: San Francisco, CA
Indexing
Scopus®
Publication Identifiers
Scopus: 2-s2.0-78650313917
Source Identifiers
ISSN: 0272-9172
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