Small-Size Mems Accelerometer Encapsulated in Vacuum Using Sigma-Delta Modulation

AuthID
 P-00S-8KK
5
Author(s)
Lima, V
·
Kuhlmann, B
·
Gaspar, J
·
Rocha, LA
Document Type
Proceedings Paper
Year published
2020
Published
in INERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
Conference
7Th Ieee International Symposium on Inertial Sensors and Systems, Inertial 2020, Date: 23 March 2020 through 26 March 2020, Sponsors: IEEE Sensors Council
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Publication Identifiers
Scopus: 2-s2.0-85085473462
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