Interfacial Integrity Enhancement of Atomic Layer Deposited Alumina on Boron Doped Diamond by Surface Plasma Functionalization

AuthID
P-00S-9F9
10
Author(s)
Document Type
Article
Year published
2020
Published
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 397
Conference
Spring Meeting of the European-Materials-Research-Society (E-Mrs) / Symposium N on Nano-Engineered Coatings and Thin Films - From Design to Applications, Date: MAY 27-31, 2019, Location: Nice, FRANCE, Sponsors: European Mat Res Soc
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Publication Identifiers
Scopus: 2-s2.0-85086075060
Wos: WOS:000543496400012
Source Identifiers
ISSN: 0257-8972
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