High Power Impulse Magnetron Sputtering of Diamond-Like Carbon Coatings

AuthID
 P-00S-B67
8
Author(s)
Aijaz, A
·
Andersson, J
·
Ferreira, F
·
Document Type
Article
Year published
2020
Published
in JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, ISSN: 0734-2101
Volume: 38, Issue: 4
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Publication Identifiers
Scopus: 2-s2.0-85089952096
Wos: WOS:000540518000002
Source Identifiers
ISSN: 0734-2101
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