A Structure Data-Driven Framework for Virtual Metrology Modeling

AuthID
 P-00S-DAX
5
Author(s)
Yang, WT
·
Document Type
Article
Year published
2020
Published
in IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, ISSN: 1545-5955
Volume: 17, Issue: 3, Pages: 1297-1306 (10)
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Publication Identifiers
Scopus: 2-s2.0-85087545677
Wos: WOS:000545379200017
Source Identifiers
ISSN: 1545-5955
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