Mass Spectrometry Improvement on an High Current Ion Implanter

AuthID
P-002-HPR
5
Author(s)
Lopes, JG
·
Rocha, J
·
Document Type
Article
Year published
2011
Published
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 269, Issue: 24, Pages: 3222-3225 (4)
Conference
10Th European Conference on Accelerators in Applied Research and Technology (Ecaart), Date: SEP 13-17, 2010, Location: Athens, GREECE, Sponsors: Aristotle Univ Thessaloniki, Fac Sci, Natl Tech Univ Athens, Natl Ctr Sci Res Demokritos, Natl Kapodistrian Univ Athens, Training Ctr Natl Bank Greece, Int Atom Energy Agcy, High Voltage Engn, Natl Electrostat Corp, Oxford Microbeams Ltd, Mesytec GmbH, MegaLab Co
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Publication Identifiers
Scopus: 2-s2.0-81855194068
Wos: WOS:000298363500083
Source Identifiers
ISSN: 0168-583X
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