Fabrication of a Mems Micromirror Based on Bulk Silicon Micromachining Combined With Grayscale Lithography

AuthID
 P-00S-WFB
8
Author(s)
Garcia, IS
·
Martins, M
·
Gaspar, J
Document Type
Article
Year published
2020
Published
in JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, ISSN: 1057-7157
Volume: 29, Issue: 5, Pages: 734-740 (7)
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Publication Identifiers
Wos: WOS:000576466500017
Source Identifiers
ISSN: 1057-7157
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