Publications

AuthID
P-00S-WPV

Author(s)

Tan, GL

Tang, D

Dastan, D

Jafari, A

Document Type

Article

Year published

2021

Published

in MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, ISSN: 1369-8001

Volume: 122

Indexing

Wos^®

Scopus^®

Google Scholar^®

Publication Identifiers

DOI: 10.1016/j.mssp.2020.105506

Scopus: 2-s2.0-85092493566

Wos: WOS:000600424700004

Source Identifiers

ISSN: 1369-8001

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