Deposition of Ti-Zr-O-N Films by Reactive Magnetron Sputtering of Zr Target with Ti Ribbons

AuthID
P-00T-CG1
8
Author(s)
Oliveira, CID
·
Martinez Martinez, D
·
Alves, E
·
Barradas, NP
·
Apreutesei, M
Document Type
Article
Year published
2021
Published
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 409
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Publication Identifiers
Scopus: 2-s2.0-85099876687
Wos: WOS:000654045600002
Source Identifiers
ISSN: 0257-8972
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