Effect of Peak Power in Deep Oscillation Magnetron Sputtering on Film Properties

AuthID
 P-00T-HPG
3
Author(s)
Document Type
Article in Press
Year published
2021
Published
in JOURNAL OF MATERIALS ENGINEERING AND PERFORMANCE, ISSN: 1059-9495
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Wos®
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Publication Identifiers
Scopus: 2-s2.0-85101161980
Wos: WOS:000618610300001
Source Identifiers
ISSN: 1059-9495
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